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mom cap和mim cap的区别
热度 2|
mom cap ( metal oxide metal cap) 从字面理解是利用了不同层次metal之间的oxide做电容的介质层,可以减少面积
mim cap (metal insulator metal cap) 从字面理解是利用了相同层次metal之间的insulator做电容的介质层.面积比较大,但是用到的metal就只有一层,可以减少mask数量.
在相同的电容值下,mim cap面积更大.
个人愚见,欢迎各位技术同仁指教.
发表评论 评论 (3 个评论)
- 回复 bill_ycsu
- According to TSMC design rule, the definition of MIM and MOM are: MIM need two different metal layers, and insulator layer is between these two layers. MOM use metal fringe cap, so MOM only require one metal layer, but has area overhead.
- 回复 standup
- bill_ycsu got the right answer,MOM cap is the inter-digitalized configure on one metal layer
/2 
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