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Well近接効果(Well Proximity Effect)

已有 3406 次阅读| 2012-11-9 10:42 |个人分类:Well Proximity Effect

(Well Proximity Effect简称为WPE)

(自己找的一些WPE的资料,如有不对的地方请指正)

NMOS or PMOS that are close to the edge of a well will exhibit a difference inthreshold and Id from that of the device located remotely from the edge.

The WPE effect occurs to every MOS: standard V t , high V t , low V t , thick/thin oxideMOS. 

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At front-end stages of CMOS wafer process,P and N types of ions are implanted to form. wells.During the implantations,lateral scattering(横向散射)of the ions nearby edges of hte photo-resist(光刻胶) causes well doping concentration,as shown in Fig.1 . The well doping concentration mainly drifts the threshold voltage of Mos transisitors.We call it "well edge proximity effect"(WPE).As advanced deep well implants with high-energy implanters are introduced to suppress parasitic bipolar gail for latch-up protection,WPE becomes severer.In circuit design ,WPE can be suppressed by making a large separation between gate poly and enclosing well edge.


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